Augent OPG550 - Optical Plasma Vacuum Gauge

Product description:

The INFICON Augent^® Optical Plasma Gauge is a compact and intelligent solution for vacuum monitoring. 

Augent combines two sensor technologies into one compact device for gas type monitoring from 1 x 10^-7 to 5 mbar and to measure total pressure from 1 x 10^-7 mbar to atmosphere at the same time.

Augent is protected by an integrated Pirani sensor to switch off plasma above 20 mbar.

The fast optical measurement principle allows the detection of in principle any type of gas.

Advantages

• High speed leak detection allows chamber leak test
• Increase of productivity and yield    
• Long life time, no filament burns, air inrush protection
• Withstand process chemistry
• Smart algorithm for easy integration 
• Compact design and small footprint  
• Reliable and fast start up 

Typical Applications

• Chamber leak check, faster RoR (rate of rise) test
• Leak check to find internal leaks from gas supply lines
• Real time end point control
• Gas type and concentrations control

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